a) The operating principle of atomic layer deposition is schematically... | Download Scientific Diagram
Things You Should Know about Atomic Layer Deposition (ALD)
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Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It | ACS Materials Au
Atomic Layer Deposition Process Development – 10 steps to successfully develop, optimize and characterize ALD recipes – Atomic Limits
The surface chemistry of thin film atomic layer deposition (ALD) processes for electronic device manufacturing - Journal of Materials Chemistry (RSC Publishing)
Kurt J. Lesker Company | Challenges for Non-Ideal Atomic Layer Deposition Processes & Systems | Enabling Technology for a Better World